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Handbook of VLSI Microlithography : Principles, Technology and Applications

by John N. Helbert, William B. Glendinning
Save up to 64%
Compare to estimated retail price: RM253.00 MYR  

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Handbook of VLSI Microlithography : Principles, Technology and Applications - Thryft
Handbook of VLSI Microlithography : Principles, Technology and Applications - Thryft

Printing high density IC patterns with lithography

This book is a comprehensive guide to the technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings. It covers the basics of resist technology and each alternative lithographic technique, including electron-beam and x-ray printing. If you're interested in IC chip production, especially in the DRAM industry, this book is a must-read. It explains the resist process and equipment parameters and their relationship, and offers an evaluation of basic metrology techniques and actual printing tools and their design, construction, and performance.

Note: While we do our best to ensure the accuracy of cover images, ISBNs may at times be reused for different editions of the same title which may hence appear as a different cover.
Sale

Handbook of VLSI Microlithography : Principles, Technology and Applications

by John N. Helbert, William B. Glendinning
Save up to 64%
Compare to estimated retail price: RM253.00 MYR  

The item you've got your eye on is secondhand. You probably already know that, but just in case!

The estimated retail price shown next to any listed item represents the first-hand prices we've seen elsewhere, or the estimated original retail price of a comparable item of the same quality, construction and material offered elsewhere in new condition.

Condition guide

Book Condition Guide

Books in Like New Condition

This book may contain very minor cosmetic defects, but it is in pristine condition. There should be no yellowing, no foxing, no water damage, and no annotations of any kind on the cover and the pages. For paperbacks, there should not be any crease marks on the spine. This book is good as new — lucky you!

*Books may be missing bundle media (e.g. CD, e-book code), if included.

Books in Very Good Condition

This book has been used, but it is still in a clean condition. There should be no foxing or annotations of any kind on the inner pages, but a sparse amount may be present on the cover, title pages, or outside edges of the book. There should be no water damage of any kind. For paperbacks, there may be light crease marks on the spine.

*Books may be missing bundle media (e.g. CD, e-book code), if included.

Books in Good Condition

We do our best to ensure the quality of our books, but there is no escaping the wear and tear that comes with time. Slight foxing and some annotations may be present on the pages and the cover. There should be no water damage of any kind. For paperbacks, there may be several crease marks on the spine.

*Books may be missing bundle media (e.g. CD, e-book code), if included.

Books in Well Read Condition

This is a well-read book, which means that the previous owner probably really enjoyed it! The cover and pages may include moderate foxing and annotations, but the text is not obscured and still readable. Moderate cosmetic defects and minor water damage may be present on the edges of the book. For paperbacks, there may be multiple crease marks on the spine.

*Books may be missing bundle media (e.g. CD, e-book code), if included.

 

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ISBN: 9780815512813
Authors: John N. Helbert, William B. Glendinning
Publisher: William Andrew
Date of Publication: 1991-01-15
Format: Hardcover
Related Collections: Science
Related Topics: Computers, Physics, Popular Science
Goodreads rating: 0.0
(rated by 0 readers)

Description

This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry.The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely covered -- including an entire chapter on resist process defectivity and the potential yield limiting effect on device production.Each alternative lithographic technique and testing method is considered and basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.
 

Printing high density IC patterns with lithography

This book is a comprehensive guide to the technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings. It covers the basics of resist technology and each alternative lithographic technique, including electron-beam and x-ray printing. If you're interested in IC chip production, especially in the DRAM industry, this book is a must-read. It explains the resist process and equipment parameters and their relationship, and offers an evaluation of basic metrology techniques and actual printing tools and their design, construction, and performance.

Note: While we do our best to ensure the accuracy of cover images, ISBNs may at times be reused for different editions of the same title which may hence appear as a different cover.

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